TY  - BOOK
AU  - Nihtianov, Stoyan
AU  - Luque López, Antonio
TI  - Smart sensors and MEMS
T2  - Woodhead Publishing series in electronic and optical materials
VL  - 51
SN  - 9780857095022
PY  - 2014///
CY  - Oxford
PB  - Woodhead Publishing
KW  - 061614556
KW  - Détecteurs
KW  - 027793168
KW  - Applications industrielles
KW  - rameau
KW  - Detectors
KW  - Industrial applications
KW  - lc
KW  - Microelectromechanical systems
KW  - 681.2
KW  - 23
KW  - TA165
KW  - .S637 2014
N2  - Ref. bibliogr. Index
ER  -