TY  - BOOK
AU  - Gerlach, Gerald
AU  - Dötzel, Wolfram
AU  - Müller, Dörte
TI  - Introduction to microsystem technology
T2  - ˜The œWiley microsystem and nanotechnology series
SN  - 9780470058619
KW  - Microelectromechanical systems
KW  - Design and construction
KW  - lc
KW  - System design
KW  - Microelectronics
KW  - 027337510
KW  - Microélectronique
KW  - rameau
KW  - 621
KW  - 22
KW  - TK7875
KW  - .G4613 2008
N2  - Bibliogr. en fin de chapitre. Index
ER  -