TY  - BOOK
AU  - Tsuchiya, Toshiyuki
AU  - Tabata, Osamu
TI  - Reliability of MEMS
T2  - Advanced micro & nanosystems
VL  - 6
SN  - 9783527314942
PY  - 2008///
CY  - Weinheim
PB  - Wiley-VCH
KW  - Microelectromechanical systems
KW  - Reliability
KW  - lc
KW  - 053513746
KW  - Systèmes microélectromécaniques
KW  - rameau
N2  - Notes bibliogr. Index
ER  -