TY  - BOOK
AU  - Chen, Lih J.
ED  - Institution of Electrical Engineers
TI  - Silicide technology for integrated circuits
T2  - Processing series
VL  - No. 5
SN  - 0863413528
PY  - 2004///
CY  - London
PB  - Institution of Electrical Engineers
KW  - Silicides
KW  - lc
KW  - Integrated circuits
KW  - Materials
KW  - 027223221
KW  - Circuits intégrés
KW  - rameau
KW  - 027806839
KW  - Silicium
KW  - 621.3815
KW  - 22
KW  - TK7871.15.S55
KW  - S52 2004
KW  - QD181.S6
KW  - S4413 2004
N2  - Références bibliogr. Index
ER  -