| 000 | 00490nam a22001817a 4500 | ||
|---|---|---|---|
| 001 | 14470 | ||
| 010 | _a9783527335459 | ||
| 090 | _a14470 | ||
| 099 |
_tOUVR _zALEX28798 |
||
| 100 | _a20241101d2015 m||y0engy50 ba | ||
| 101 | _aeng | ||
| 200 | _aResonant MEMS | ||
| 214 |
_cWiley-VCH _d2015 |
||
| 215 |
_aXXV + 483 _d17x25 |
||
| 225 | _aAdvanced micro & nanosystems | ||
| 700 |
_aBRAND _bOlivier _4070 |
||
| 701 |
_aDUFOUR _bIsabelle _4070 |
||
| 701 |
_aHEINRICH _bStephen M. _4070 |
||