000 00425nam a22001457a 4500
001 14492
010 _a9789814411066
090 _a14492
099 _tOUVR
_zALEX28849
100 _a20241101d2014 m||y0engy50 ba
101 _aeng
200 _aMEMS Cost Analysis - From Laboratory to Industry
214 _aSingapour
_cPan Stanford Publishing
_d2014
215 _aXVI + 289
_d16 x 23.5
700 _aLAWES
_bRon
_4070