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200	0		_aSmart sensors and MEMS _eintelligent devices and microsystems for industrial applications _fedited by Stoyan Nihtianov and Antonio Luque
210			_aOxford _cWoodhead Publishing _dcop. 2014
215			_a1 vol. (xxii-538 p.) _cill. _d24 cm
225	0		_aWoodhead Publishing series in electronic and optical materials _x2050-1501 _v51
320			_aRef. bibliogr. Index
330			_aLa 4ème de couv. indique : "Smart sensors and MEMS can include a variety of devices and systems that have a high level of functionality. They do this either by integrating multiple sensing and actuating modes into one device, or else by integrating sensing and actuating with information processing, analog-to-digital conversion and memory functions. Part I outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, and advanced optical incremental sensors (encoders and interferometers), among other topics. The second part of the book describes the industrial applications of smart micro-electro-mechanical systems (MEMS).Some of the topics covered in this section include microfabrication technologies used for creating smart devices for industrial applications, microactuators, dynamic behaviour of smart MEMS in industrial applications, MEMS integrating motion and displacement sensors, MEMS print heads for industrial printing, Photovoltaic and fuel cells in power MEMS for smart energy management, and radio frequency (RF)-MEMS for smart communication microsystems. Smart Sensors and MEMS is invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry, and engineers looking for industrial sensing, monitoring and automation solutions."
359	2		_bPart I. Smart sensors for industrial applications _c1. What makes sensor devices and microsystems 'intelligent' or 'smart'? / R. Taymanov and K. Sapozhnikova _c2. Direct interface circuits for sensors / F. Reverter _c3. Capacitive sensors for displacement measurement in the sub-nanometer range / S. Xia and S. Nihtianov _c4. Integrated inductive displacement sensors for harsh industrial environments / M. R. Nabavi _c5. Advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and the extreme ultraviolet (EUV) spectral range / A. Gottwald and F. Scholze _c6. Integrated polarization analyzing CMOS image sensors for detection and signal processing / M. Sarkar and A. J. P. Theuwissen _c7. Advanced interfaces for resistive sensors / A. Flammini and A. Depari _c8. Reconfigurable ultrasonic smart sensor platform for nondestructive evaluation and imaging applications / J. Sanie, E. Oruklu and S. Gilliland _c9. Advanced optical incremental sensors: encoders and interferometers / S. J. A. G. Cosijns and M. J. Jansen _bPart II. Smart micro-electro-mechanical systems (MEMS) for industrial applications _c10. Microfabrication technologies used for creating smart devices for industrial applications / J. M. Quero, F. Perdigones and C. Aracil _c11. Microactuators: design and technology / L. Li and Z. J. Chew _c12. Dynamic behavior of smart MEMS in industrial applications / M. Pustan, C. Birleanu and C. Dudescu _c13. MEMS integrating motion and displacement sensors / G. Langfelder and A. Tocchio _c14. MEMS print heads for industrial printing / S. Lee and J. Choi _c15. Photovoltaic and fuel cells in power MEMS for smart energy management / J. García and F. J. Delgado, and P. Ortega and S. Bermejo _c16. Radio frequency (RF)-MEMS for smart communication microsystems / D. Dubuc and K. Grenier _c17. Smart acoustic sensor array (SASA) system for real-time sound processing applications / M. Turqueti, E. Oruklu and J. Saniie
410			_0170758133 _tWoodhead Publishing series in electronic and optical materials (Print) _x2050-1501
452			_0193437317 _tSmart sensors and MEMS _ointelligent devices and microsystems for industrial applications _fedited by Stoyan Nihtianov and Antonio Luque _sWoodhead Publishing Series in Electronic and Optical Materials
606			_3061614556 _aDétecteurs _3027793168 _xApplications industrielles _2rameau
606			_aDetectors _xIndustrial applications _2lc
606			_aMicroelectromechanical systems _xIndustrial applications _2lc
676			_a681.2 _v23
680			_aTA165 _b.S637 2014
702		1	_3179446398 _aNihtianov _bStoyan _4340
702		1	_3031587364 _aLuque López _bAntonio _4340