| 000 | 01625cam0a2200469 4500 | ||
|---|---|---|---|
| 001 | 7158 | ||
| 009 | 137109091 | ||
| 003 | http://www.sudoc.fr/137109091 | ||
| 005 | 20250630091733.0 | ||
| 010 |
_a9780470058619 _brel. |
||
| 010 |
_a0-470-05861-7 _brel. |
||
| 020 |
_aUS _b 2007050172 |
||
| 020 |
_aGB _bA786157 |
||
| 090 | _a7158 | ||
| 099 |
_tOUVR _zALEX19437 |
||
| 100 | _a20091009d2008 k y0frey50 ba | ||
| 101 | 1 |
_aeng _cger _2639-2 |
|
| 102 |
_aGB _aUS |
||
| 105 | _aa a 001yy | ||
| 106 | _ar | ||
| 181 |
_6z01 _ctxt _2rdacontent |
||
| 181 | 1 |
_6z01 _ai# _bxxxe## |
|
| 182 |
_6z01 _cn _2rdamedia |
||
| 182 | 1 |
_6z01 _an |
|
| 183 | 1 |
_6z01 _anga _2RDAfrCarrier |
|
| 200 | 1 |
_aIntroduction to microsystem technology _ea guide for students _fGerald Gerlach, Wolfram Dötzel _gtranslated by Dörte Müller |
|
| 214 | 0 |
_aChichester, England _aHoboken, NJ _cJ. Wiley & Sons |
|
| 214 | 4 | _dC 2008 | |
| 215 |
_a1 vol. (XXIII-351 p.) _cill. _d26 cm |
||
| 225 | 2 | _aThe Wiley microsystem and nanotechnology series | |
| 320 | _aBibliogr. en fin de chapitre. Index | ||
| 410 | _tThe Wiley microsystem and nanotechnology series | ||
| 454 | _tEinführung in die Mikrosystemtechnik | ||
| 606 |
_aMicroelectromechanical systems _xDesign and construction _2lc |
||
| 606 |
_aSystem design _2lc |
||
| 606 |
_aMicroelectronics _2lc |
||
| 606 |
_3027337510 _aMicroélectronique _2rameau |
||
| 676 |
_a621 _v22 |
||
| 680 |
_aTK7875 _b.G4613 2008 |
||
| 700 | 1 |
_3137109563 _aGerlach _bGerald _f19..-.... _4070 |
|
| 701 | 1 |
_3137109830 _aDötzel _bWolfram _f19..-.... _4070 |
|
| 701 | 1 |
_3242706444 _aMüller _bDörte _4730 |
|