| 000 | 01141cam0a2200337 4500 | ||
|---|---|---|---|
| 001 | 7162 | ||
| 009 | 172737591 | ||
| 003 | http://www.sudoc.fr/172737591 | ||
| 005 | 20250630091733.0 | ||
| 010 |
_a9783527314942 _brel. |
||
| 090 | _a7162 | ||
| 099 |
_tOUVR _zALEX19442 |
||
| 100 | _a20131105d2008 k y0frey50 ba | ||
| 101 | 0 |
_aeng _2639-2 |
|
| 102 | _aDE | ||
| 105 | _aa a 001yy | ||
| 106 | _ar | ||
| 181 |
_6z01 _ctxt _2rdacontent |
||
| 181 | 1 |
_6z01 _ai# _bxxxe## |
|
| 182 |
_6z01 _cn _2rdamedia |
||
| 182 | 1 |
_6z01 _an |
|
| 200 | 1 |
_aReliability of MEMS _etesting of materials and devices _fedited by Osamu Tabata and Toshiyuki Tsuchiya |
|
| 210 |
_aWeinheim _cWiley-VCH _dcop. 2008 |
||
| 215 |
_a1 vol. (XX-303 p.) _cill. _d25 cm |
||
| 225 | 2 |
_aAdvanced micro & nanosystems _v6 |
|
| 320 | _aNotes bibliogr. Index | ||
| 410 |
_0097695653 _tAdvanced micro & nanosystems _x1865-1399 _v6 |
||
| 606 |
_aMicroelectromechanical systems _xReliability _2lc |
||
| 606 |
_3053513746 _aSystèmes microélectromécaniques _2rameau |
||
| 702 | 1 |
_3173111122 _aTsuchiya _bToshiyuki _4340 |
|
| 702 | 1 |
_3160377870 _aTabata _bOsamu _f1956-.... _4340 |
|